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TheElec(韩国电子产业媒体)原文发布 09-13 07:26Radar 收录 09-13 09:46查看原文 ↗

Youngwoo DSP在韩国晶圆代工厂测试WLP检测设备

Youngwoo DSP Tests WLP Inspection Tool at Korean Foundry
中文摘要

Youngwoo DSP向韩国一家中型半导体晶圆代工厂的生产线供应晶圆级封装(WLP)检测设备,用于验证测试。此举预计将扩大该公司的相关业务。事件涉及Youngwoo DSP与这家韩国中型晶圆代工厂,属于半导体封装检测设备进入产线验证环节,与元器件制造设备供应链相关。

原文深度解读

文章主题为韩国设备企业Youngwoo DSP向韩国一家中型半导体晶圆代工厂产线供应晶圆级封装(WLP)检测设备VEGA S-1000进行验证测试,时间点为9月11日前后,涉及Youngwoo DSP、韩国中型晶圆代工厂、韩国OSAT企业LB Semicon以及一家韩国存储芯片制造商。关键数字包括验证期2至3个月、可检测1.7微米缺陷、处理能力103 WPH(竞争设备为42 WPH,约2.5倍)、缺陷检测成功率99.7%、支持200毫米和300毫米晶圆、可分析5微米及以下凸块、与存储芯片厂商的供应讨论完成度约40%。该事件属于半导体封装检测设备进入产线验证环节,与元器件制造设备供应链相关。

  • Youngwoo DSP本月将向一家韩国晶圆代工厂产线供应少量WLP检测系统,设备将进行2至3个月验证,之后双方预计讨论量产供应。
  • 该WLP检测设备此前已在韩国OSAT企业LB Semicon产线进行长期验证,公司根据验证数据优化了规格和性能,现作为新客户向该晶圆代工厂供应。
  • 设备型号为VEGA S-1000,是二维和三维自动光学检测(AOI)系统,可检测WLP工艺中形成的微凸块、铜柱和金凸块等细间距结构,支持200毫米(8英寸)和300毫米(12英寸)晶圆。
  • 产线安装的系统针对微凸块检测优化:线扫描相机2D检测可识别凸块异物和位置误差,可检测小至1.7微米的异物和缺陷,并测量缺失凸块、直径、面积、长度和位置偏差;3D光学检测可测量凸块三维形状和高度,分析5微米及以下凸块的水平均匀性。
  • 系统结合2D和3D检测与基于AI的缺陷检测和分类,缺陷检测成功率为99.7%;处理能力为103 WPH,约为竞争设备42 WPH的2.5倍;后续可增加光学部件扩展至套刻量测。
  • Youngwoo DSP还在与一家韩国存储芯片制造商讨论设备供应,已提供LB Semicon产线设备获得的凸块检测数据,并按要求提交补充材料,整体供应讨论完成度约为40%;后端半导体晶圆检测设备市场由Camtek、Onto Innovation和KLA等全球供应商主导,Youngwoo DSP寻求以性能和价格竞争力及更快维护支持实现设备本地化。

供应链影响

  • 若验证测试通过并进入量产供应,可能增加韩国晶圆代工厂对本地WLP检测设备的采购选择,但取决于验证结果和后续量产讨论。
  • 该设备在LB Semicon产线的长期验证数据可能被用于向其他韩国客户(如存储芯片制造商)推广,或有助于缩短新客户验证周期,但取决于客户对数据和补充材料的评估。
  • Youngwoo DSP强调价格竞争力和更快维护支持,可能对Camtek、Onto Innovation和KLA等全球供应商在韩国后端检测设备市场的份额形成一定竞争压力,但取决于客户对性能、价格和维护的综合考量。
  • 设备支持200毫米和300毫米晶圆以及微凸块检测,可能使其适用于多种WLP产线,但实际供应链影响取决于该晶圆代工厂及存储芯片制造商的量产采用情况。
  • 若供应讨论完成度从约40%继续推进,可能扩大Youngwoo DSP在半导体设备领域的业务范围,但取决于后续验证、客户需求和市场接受度。

系统解读,仅作为判断线索,不构成备货、出货、涨价或投资建议。

正文内容 · AI翻译

Youngwoo DSP的VEGA S-1000。(照片:Youngwoo DSP)

Youngwoo DSP正在向韩国一家中型半导体晶圆代工厂的生产线供应晶圆级封装(WLP)检测设备,用于验证测试。此举预计将把该公司的业务从传统的显示设备领域扩展到半导体领域。

据行业消息人士9月11日称,Youngwoo DSP本月将向一家韩国晶圆代工厂生产线供应少量WLP检测系统。该设备将进行两到三个月的验证,之后双方预计将讨论量产供应。

“Youngwoo DSP的WLP检测设备曾在韩国一家外包半导体封装测试(OSAT)公司的生产线上进行长期验证,”一位行业官员表示。“该公司根据验证数据优化了设备的规格和性能,现在正作为新客户向该晶圆代工厂供应。”据悉,涉及的OSAT公司是LB Semicon。

该设备是VEGA S-1000,一种二维和三维自动光学检测(AOI)系统。它可以检测半导体晶圆上WLP工艺中形成的微凸块、铜柱和金凸块等细间距结构。该系统同时支持200毫米(8英寸)和300毫米(12英寸)晶圆。

安装在该晶圆代工厂生产线上的系统已针对微凸块检测进行了优化。其基于线扫描相机的2D检测可捕获晶圆表面的平面图像,以识别凸块上的异物和位置误差。线扫描逐行捕获移动物体,并将扫描结果组合成2D图像。该系统可检测小至1.7微米(㎛)的异物和缺陷,同时测量缺失凸块、直径、面积、长度和位置偏差。

3D光学检测测量凸块的三维形状和高度。它可以根据3D轮廓分析5微米或更小的凸块是否保持水平均匀性。将2D和3D检测与基于人工智能(AI)的缺陷检测和分类相结合,可提高检测性能和可靠性。该系统的缺陷检测成功率为99.7%。

该设备的生产率也高于竞争对手的同类系统。它每小时处理103片晶圆(WPH),约为竞争设备42 WPH的2.5倍。后续可增加光学部件,将系统扩展至套刻量测。

Youngwoo DSP还在与一家韩国存储芯片制造商讨论设备供应。它已提供了在LB Semicon生产线上运行的设备所获得的凸块检测数据,并正在按要求提交补充材料。据悉,整体供应讨论已完成约40%。

后端半导体晶圆检测设备市场由全球供应商主导,包括以色列的Camtek以及美国的Onto Innovation和KLA。Youngwoo DSP正寻求通过强调其相对于外国系统的性能和价格竞争力,以及为韩国客户提供更快的维护支持,来实现设备本地化。

Youngwoo DSP’s VEGA S-1000. (Photo: Youngwoo DSP)

Youngwoo DSP is supplying wafer-level packaging (WLP) inspection equipment to the production line of a mid-sized Korean semiconductor foundry for a validation test. The move is expected to expand the company’s business beyond its traditional focus on display equipment into semiconductors.

According to industry sources on Sept. 11, Youngwoo DSP will supply a small number of WLP inspection systems to a Korean foundry production line this month. The equipment will undergo validation for two to three months, after which the two sides are expected to discuss mass-production supply.

“Youngwoo DSP’s WLP inspection equipment underwent long-term validation on the production line of a Korean outsourced semiconductor assembly and test (OSAT) company,” an industry official said. “The company optimized the equipment’s specifications and performance based on the validation data and is now supplying it to the foundry as a new customer.” The OSAT company involved is understood to be LB Semicon.

The equipment is the VEGA S-1000, a two-dimensional and three-dimensional automated optical inspection (AOI) system. It can inspect fine-pitch structures including micro bumps, copper pillars and gold bumps formed during WLP processes on semiconductor wafers. The system supports both 200-millimeter (8-inch) and 300-millimeter (12-inch) wafers.

The system being installed on the foundry production line has been optimized for micro-bump inspection. Its line-scan camera-based 2D inspection captures planar images of the wafer surface to identify foreign particles on bumps and positional errors. Line scanning captures a moving object one line at a time and combines the scans into a 2D image. The system can detect foreign particles and defects as small as 1.7 micrometers (㎛), while measuring missing bumps, diameter, area, length and positional deviation.

The 3D optical inspection measures the three-dimensional shape and height of bumps. It can analyze whether bumps measuring 5㎛ or less maintain horizontal uniformity based on their 3D profiles. Combining 2D and 3D inspection with artificial intelligence (AI)-based defect detection and classification improves detection performance and reliability. The system has a defect-detection success rate of 99.7%.

The equipment also offers higher productivity than comparable systems from competitors. It processes 103 wafers per hour (WPH), about 2.5 times the 42 WPH of competing equipment. Additional optics could later be added to expand the system to overlay metrology.

Youngwoo DSP is also discussing equipment supply with a Korean memory-chip maker. It has provided bump inspection data obtained from equipment operating on LB Semicon’s production line and is submitting supplementary materials upon request. The overall supply discussions are understood to be about 40% complete.

The back-end semiconductor wafer inspection equipment market is dominated by global suppliers including Israel’s Camtek and U.S.-based Onto Innovation and KLA. Youngwoo DSP is seeking to localize the equipment by emphasizing its performance and price competitiveness against foreign systems as well as faster maintenance support for Korean customers.

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